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標題: Fabrication and modeling of the gray-scale mask based aspheric refraction microlens array
作者: Wang, G.J.
Wang, S.Y.
Chin, C.H.
關鍵字: refraction;microlens array;gray-scale mask
Project: Jsme International Journal Series C-Mechanical Systems Machine Elements and Manufacturing
期刊/報告no:: Jsme International Journal Series C-Mechanical Systems Machine Elements and Manufacturing, Volume 46, Issue 4, Page(s) 1598-1603.
In this research, the manufacturing processes of aspherical refraction microlens array by gray-scale mask if investigated. In the first part of this research, we emphasize on the gray-scale mask based microlens array fabrication processes through the UV-LIGA approach. Furthermore, a two-stage process-modeling scheme is proposed to reduce the time-consuming trail-and-error parameters tuning labor works. Experimental results demonstrate that the proposed approach can well model the fabrication process and is capable of providing effective fabrication parameters once the diameter and height of a certain microlens is provided.
ISSN: 1344-7653
DOI: 10.1299/jsmec.46.1598
Appears in Collections:生醫工程研究所

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