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標題: Analysis of an annular PZT actuator for a droplet ejector
作者: 王東安
Wang, D.A.
Cheng, C.H.
Hsieh, Y.H.
Zhang, Z.X.
關鍵字: PZT actuator;analytical analysis;droplet ejector;electroforming;piezoelectric actuator;element analysis;transformer;micropump;bimorph;mode
Project: Sensors and Actuators a-Physical
期刊/報告no:: Sensors and Actuators a-Physical, Volume 137, Issue 2, Page(s) 330-337.
An analytical solution for deflection of an annular lead zirconate titanate (PZT) actuator with application in droplet ejection is developed. A linear strain distribution across the thickness direction is assumed in the derivation of the analytical solution. The analytical results agree well with finite element analyses. Fabrication process of a droplet ejector actuated by the PZT is described. The PZT is prepared by powder metallurgy and patterned with poling electrodes. The ejector is fabricated by nickel electroforming. Experimental results of static deflection of the fabricated device confirm the effectiveness of the analytical solution. Droplet ejection of the ejector is demonstrated. (c) 2007 Elsevier B.V. All rights reserved.
ISSN: 0924-4247
DOI: 10.1016/j.sna.2007.03.020
Appears in Collections:精密工程研究所

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