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標題: Monotonic and fatigue testing of freestanding submicron thin beams application for MEMS
作者: Lin, M.T.
Tong, C.J.
Shiu, K.S.
關鍵字: tensile behavior;gold-films;mechanical-properties;grained films;copper-films;deformation;cu
Project: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
期刊/報告no:: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, Volume 14, Issue 7, Page(s) 1041-1048.
A freestanding submicron thin film specimen is designed and fabricated here to carry out a series of monotonic and fatigue testing. This freestanding beam was loaded by performing monotonic loading/unloading or closed-loop load controlled tension-tension fatigue experiments on it. Loading was applied using a piezoelectric actuator with 0.1 mu m resolution connected to the test specimen. Loads were measured by connected a capacitor load cell with a resolution of less than 0.1 mN. The modulus, yield stress and maximum stress of tested submicron thin films at room temperature were found from monotonic loading/unloading tests. The results of 300 nm copper thin films fatigue experiments demonstrated a trend of decreasing cycles to failure with increasing loading amplitude and increasing mean stress.
ISSN: 0946-7076
DOI: 10.1007/s00542-007-0463-5
Appears in Collections:精密工程研究所

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