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標題: The variation of microstructure in Czochralski silicon induced by low-high two step anneal
作者: 洪瑞華
Kung, C.Y.
Liu, C.M.
Hsu, W.
Horng, R.H.
關鍵字: oxygen precipitation retardation;defects;dislocations;model
Project: Journal of Applied Physics
期刊/報告no:: Journal of Applied Physics, Volume 83, Issue 1, Page(s) 56-59.
Systematic low-high two-step and high-low-high three-step annealing studies were conducted to investigate the microdefects generated in Czochralski silicon wafers. It was found that cluster precipitates entangled with dislocations are annihilated during extended low temperature anneal. A model involving the recombination of vacancies with interstitials is proposed to explain this phenomenon. (C) 1998 American Institute of Physics.
ISSN: 0021-8979
DOI: 10.1063/1.366701
Appears in Collections:精密工程研究所

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