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標題: Vacuum suction aid for microlens array formation using LIGA-like process
作者: Shyu, R.F.
Yang, H.H.
關鍵字: electroforming;microlens array;molding;vacuum suction;fabrication
Project: International Journal of Advanced Manufacturing Technology
期刊/報告no:: International Journal of Advanced Manufacturing Technology, Volume 29, Issue 5, Page(s) 518-523.
Microlens array fabrication using a vacuum suction process combed with the LIGA-like process is presented in this paper. The circular patterned array was designed on a photomask and transferred onto a substrate using photoresist patterning. Electroforming technology was used to convert the photoresist patterns into a metallic molds with an array of nozzles. Liquid JSR resist was spun onto the substrate joining the metallic mold to remove microlens array under vacuum conditions. The exposure energy and vacuum pressure were essential parameters in the microlens array manufacturing process. Microlens arrays with 50 mu m in diameter at -50 cm-Hg vacuum pressure and 100 mu m in diameter at -60 cm-Hg vacuum pressure were successfully formed. The produced microlens arrays presented smooth measured surface profiles coincident with the optical lens geometry.
ISSN: 0268-3768
DOI: 10.1007/s00170-005-2549-5
Appears in Collections:精密工程研究所

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