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標題: Fabrication of microlens array with graduated sags using UV proximity printing method
作者: 楊錫杭
Yang, H.
Chao, C.K.
Lin, T.H.
Lin, C.P.
關鍵字: microlens array;UV proximity printing;gradual sag height;micro-optics
Project: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
期刊/報告no:: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, Volume 12, Issue 1-2, Page(s) 82-90.
A graduated microlens array is presented in this paper. The proposed device has the same aperture microlens with a gradually increasing sag in the substrate. The design produces gradual decrease in the focal length and intensity when the light passes through the graduated microlens array. This paper presents a new graduated microlens array fabrication method that uses a variable printing gap in the UV lithography process. This method can precisely control the geometric profile of each microlens array without using the thermal reflow process. The angles between the mask and photoresist were placed at 5 degrees, 8 degrees, 10 degrees, 15 degrees, and 20 degrees using a fixture designed in this study. The mask patterns were ellipses with an isosceles triangle arrangement to compensate for the partial geometry.
ISSN: 0946-7076
DOI: 10.1007/s00542-005-0025-7
Appears in Collections:精密工程研究所

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