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標題: Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect
作者: Shyu, R.F.
Yang, H.
Tsai, W.R.
Tsai, J.C.
關鍵字: single-mode fiber;coupling efficiency;laser-diode
Project: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
期刊/報告no:: Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems, Volume 13, Issue 11-12, Page(s) 1601-1606.
This paper presents a simple method for fabricating a micro-ball lens and its array. The core technology involves the hydrophobic characteristics of polyterafluoroethylene (PTFE) substrate. High contact angle between the melted photoresist pattern and PTFE generates the micro-ball lens and array. The PTFE thin film is spun onto a silicon wafer and oven dried. Photoresist AZ4620 is used to pattern micro-columns with various diameters; 60, 70 and 80 mu m. A thermal reflow process is then applied to melt these micro-column patterns into a micro-ball lens array. The achieved micro-ball lens array has a diameter of 98 mu m fabricated using 80 mu m diameter patterns. This method provides a simple fabrication process and low material cost.
ISSN: 0946-7076
DOI: 10.1007/s00542-006-0265-1
Appears in Collections:精密工程研究所

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