Please use this identifier to cite or link to this item:
|標題:||Fabrication of rolling mold for a 200 mu m microlens array by 3D LIGA-like processes||作者:||Tsai, J.C.
|關鍵字:||microlens array;3D LIGA-like processes;repeatability||Project:||Materials Science Forum||期刊/報告no：:||Materials Science Forum, Volume 505-507, Page(s) 271-276.||摘要:||
This paper presents a series of three dimensional (3D) LIGA-like processes to fabricate microlens arrays on a cylindrical substrate. The processes consist of design of mask and rotating mechanism, coating of photoresist, 3D UV lithography, development and hardening, and electroforming. It transfers microlens array pattern to a phi 76mm cylindrical stainless steel substrate intended for use as a rolling mold via electroforming. Process technologies are investigated and experiments are design and conducted as a proof of concept. Experimental results showed that phi 200 mu m microlens arrays can be fabricated on the substrate with good repeatability. The microlens pattern transferred to the 100 mu m-thick film showed the feasibility and stability of the 3D lithography process.
|Appears in Collections:||精密工程研究所|
Show full item record
TAIR Related Article
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.