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標題: Fabrication of rolling mold for a 200 mu m microlens array by 3D LIGA-like processes
作者: Tsai, J.C.
Liu, K.
Yang, H.
關鍵字: microlens array;3D LIGA-like processes;repeatability
Project: Materials Science Forum
期刊/報告no:: Materials Science Forum, Volume 505-507, Page(s) 271-276.
This paper presents a series of three dimensional (3D) LIGA-like processes to fabricate microlens arrays on a cylindrical substrate. The processes consist of design of mask and rotating mechanism, coating of photoresist, 3D UV lithography, development and hardening, and electroforming. It transfers microlens array pattern to a phi 76mm cylindrical stainless steel substrate intended for use as a rolling mold via electroforming. Process technologies are investigated and experiments are design and conducted as a proof of concept. Experimental results showed that phi 200 mu m microlens arrays can be fabricated on the substrate with good repeatability. The microlens pattern transferred to the 100 mu m-thick film showed the feasibility and stability of the 3D lithography process.
ISSN: 0255-5476
Appears in Collections:精密工程研究所

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