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http://hdl.handle.net/11455/46713| 標題: | (Microsystem Technologies,12:187-192)High-aspect-ratio microstructural posts electroforming modeling and fabrication in LIGA process | 作者: | H. Yang R. Chein T.H. Tsai J.C. Chang J.C. Wu |
關鍵字: | High-aspect-ratio;microstructural posts;electroforming modeling;fabrication;LIGA process | 出版社: | Germany:Springer Berlin | Project: | Microsystem Technologies,12:187-192 | URI: | http://hdl.handle.net/11455/46713 |
| Appears in Collections: | 精密工程研究所 |
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