Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/46715
標題: (International Journal of Advanced Manufacturing Technology,29(5):518-523)Vacuum suction aid for microlens array formation using LIGA-like process
作者: R.F. Shyu
H. Yang
關鍵字: Vacuum suction aid for microlens array;formation;LIGA-like process
出版社: England:Springer London
Project: International Journal of Advanced Manufacturing Technology, Volume 29, Issue 5, Page(s) 518-523.
URI: http://hdl.handle.net/11455/46715
Appears in Collections:精密工程研究所

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