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標題: (Microsystem Technologies,12:173-179)Integrated electromagnetic microactuator with a large driving force
作者: C.T. Pan
H. Yang
M.C. Chou
S.C. Shen
關鍵字: Microelectronic fabrication;Microelectromechanical device;Permanent magnet;Magnetic device;High frequency;Planar technology;Magnetic force;Magnetic flux;Closed loop;Magnetic field;Diaphragm;Excimer lasers;Micromachining;Laser beam machining;Circuit design;Magnetic circuit;Microactuators;Electromagnetic actuators
出版社: Germany:Springer Berlin
Project: Microsystem Technologies,12:173-179
Appears in Collections:精密工程研究所

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