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標題: (Microsystem Technologies,10(7):571-577)High-aspect-ratio microstructure filling by centrifugal force field modeling
作者: T.H. Tsai
H. Yang
R. Chein
關鍵字: High-aspect-ratio;microstructure filling;centrifugal force field modeling
出版社: Germany:Springer Berlin
Project: Microsystem Technologies, Volume 10, Issue 7, Page(s) 571-577.
Appears in Collections:精密工程研究所

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