Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/46732
標題: (Journal of Micromechanics and Microengineering,11(2):094-099)Ultra-fine machining tool/molds by LIGA technology
作者: H. Yang
C.T. Pan
M.C. Chou
關鍵字: Ultra-fine machining tool/molds;LIGA technology
出版社: USA:Institute of Physics Publishing
Project: Journal of Micromechanics and Microengineering, Volume 11, Issue 2, Page(s) 94-99.
URI: http://hdl.handle.net/11455/46732
Appears in Collections:精密工程研究所

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