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http://hdl.handle.net/11455/46735| 標題: | (Sensors and Materials,11(6):339-347)Behavior of the developing process for ultra-deep microstructures | 作者: | C.T. Pan H. Yang H.J. Wang M.C. Chou |
關鍵字: | Behavior of the developing process;ultra-deep microstructures | 出版社: | Japan:MARUZEN CO LTD | Project: | Sensors and Materials, Volume 11, Issue 6, Page(s) 339-347. | URI: | http://hdl.handle.net/11455/46735 |
| Appears in Collections: | 精密工程研究所 |
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