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標題: (2000 IEDMS Symposium A,p218-p221)Low dielectric constant and high thermal stability fluorinated amorphous carbon films
作者: Y. L. Jiang
K. S. Wu
K. S. Lin
L. H. Chen
W. H. Wu
C. H. Wu
Y. S. Liao
L. H.Chang
關鍵字: Low dielectric constant;high thermal stability;amorphous carbon films
Project: 2000 IEDMS Symposium A, Page(s) 218-221.
Appears in Collections:光電工程研究所

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