Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/47617
標題: 以射頻磁控濺鍍法製備氫感測用矽鍺熱電薄膜
SiGe Thermoelectric Thin Film for Hydrogen Sensing Prepared by RF Magnetron Sputtering
作者: 張立信
關鍵字: 應用研究;材料科技
URI: http://hdl.handle.net/11455/47617
其他識別: NSC98-2221-E005-032-MY2
Appears in Collections:材料科學與工程學系

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