Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/47800
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dc.contributor.author戴慶良zh_TW
dc.contributor.other行政院國家科學委員會zh_TW
dc.contributor.other國立中興大學機械工程學系(所)zh_TW
dc.date2010zh_TW
dc.date.accessioned2014-06-06T08:25:51Z-
dc.date.available2014-06-06T08:25:51Z-
dc.identifierNSC98-2221-E005-070zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/47800-
dc.description.abstract本計畫擬以CMOS (complementary metal oxide semiconductor)-MEMS (microelectromechanical systems)技術研製整合讀出電路的微機械式濾波器,適合應用在無線射頻通訊系統。就國內外的發展現況,利用CMOS- MEMS技術,將微機械式濾波器與電路整合製作在單一晶片上,是一種新的技術,相關的技術產品,尚未被商品化。本計畫將發展高品質因子和低驅動電壓的微機械式濾波器。主要的創新性,包括(1)利用商業化CMOS製程製作機械式微濾波器;(2)僅需一道無光罩的後製程處理,即可釋放微濾波器所需的懸浮結構;(3)將機械式微濾波器與感測電路整合,製作在單一晶片上;(4)適當的設計微濾波器之驅動端結構和支撐結構,使驅動電壓低於12V;(5) 在真空下的品質因子高於5000,;(6)操作頻率高於40MHz。本計畫擬設計之微機械式濾波器的結構材料,由CMOS的金屬層構成,其構造包含有驅動端和感測端結構,此機械式濾波器是利用靜電式驅動,當施加交流電壓於驅動端,並使濾波器結構操作在共振狀態,則感測端會產生很大的電容變化,此電容變化經由讀出電路轉換為電壓輸出。zh_TW
dc.description.abstractThis project investigates the fabrication of micromechanical filters integrated with readoutcircuit using the CMOS (complementary metal oxide semiconductor)-MEMS(microelectromechanical system) technique. The micromechanical filters can be applied inwireless communication systems. The approach that the use of CMOS-MEMS processmanufactures micromechanical filters integrated with readout circuit is a novel technique,which the related products are not commercial yet. Therefore, this project will develop highquality factor and low driving voltage micromechanical filters. The characteristics of themicromechanical filters include: (1) the fabrication uses the commercial CMOS process; (2)the post-process requires only one wet etching process to release the suspended structures ofthe filters; (3) micro filters and readout circuit are fabricated on a chip; (4) the drivingvoltage is lower than 12 V; (5) the quality factor is higher than 5000 in vacuum; (6) theoperating frequency is larger than 40 MHz. The micromechanical filters that contain adriving part and a sensing part are actuated by electrostatic force. Material of themicromechanical filters is the metal layer of the CMOS process. The sensing part generates achange in capacitance upon applying a driving voltage to the driving part. The capacitancevariation of the sensing part is converted the output voltage by a readout circuit.en_US
dc.language.isozh_TWzh_TW
dc.relation.urihttp://grbsearch.stpi.narl.org.tw/GRB/result.jsp?id=1901724&plan_no=NSC98-2221-E005-070&plan_year=98&projkey=PB9808-0430&target=plan&highStr=*&check=0&pnchDesc=CMOS-MEMS%E5%BE%AE%E6%A9%9F%E6%A2%B0%E5%BC%8F%E6%BF%BE%E6%B3%A2%E5%99%A8en_US
dc.subject電子電機工程類zh_TW
dc.subject技術發展zh_TW
dc.titleCMOS-MEMS微機械式濾波器zh_TW
dc.titleCMOS-MEMS Micromechanical Filtersen_US
dc.typeResearch Reportszh_TW
item.cerifentitytypePublications-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.languageiso639-1zh_TW-
item.fulltextno fulltext-
item.grantfulltextnone-
item.openairetypeResearch Reports-
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