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標題: 以類神經網路為基礎之Run-To-Run製程控制器設計及其在化學機械研磨製程即時控制之應用(I)
Development of a Neural-Network Based Run-To-Run Controller with Application on the On-Line Control of CMP Processes(I)
作者: 王國禎
關鍵字: 技術發展;Process controller;自動化工程, 機械工程類;製程控制器;線上控制;化學機械研磨;類神經網路;On line control;Chemical mechanical polishing (CMP);Neural network
其他識別: NSC90-2212-E005-023
Appears in Collections:機械工程學系所

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