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標題: 以類神經網路為基礎之Run-To-Run製程控制器設計及其在化學機械研磨製程即時控制之應用(II)
Development of a Neural-Network Based Run-To-Run Controller with Application on the On-Line Control of CMP Processes (II)
作者: 王國禎
關鍵字: 技術發展;自動化工程, 化學工程類, 電子電機工程類
其他識別: NSC91-2212-E005-012
Appears in Collections:機械工程學系所

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