Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/5379
標題: 比較不同世代廠TFT-LCD 產業的溫室氣體排放盤查之研究
Comparisons of Greenhouse Gas Emission Inventory from Different Generation TFT-LCD Industry
作者: 蔡政杰
Tsai, Cheng-Chieh
關鍵字: Greenhouse gases;溫室氣體;Thin fim transisitor liquid-crystal display;PFCs;TFT-LCD;NF3;SF6;N2O;薄膜電晶體液晶顯示器;PFCs;TFT-LCD;NF3;SF6;N2O
出版社: 環境工程學系所
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摘要: 
近年來溫室氣體排放所引起的全球氣候變遷已逐漸在全球各地產生明顯的效應,並逐步威脅生存在此環境中的生物與人類,根據2007年2月2日IPCC公布第四次評估報告,強調全球平均溫度增加,非常可能由人為溫室氣體排放造成。
目前平面顯示器產業為政府擬定「兩兆雙星核心優勢產業」發展的重點,在光電產值不斷創新高,其背後除了龐大的商業產品出現以外,其製造過程將會耗用大量能源,並排放溫室氣體SF6、N2O、NF3,在國際間各國對環境保護更加重視,而國內台灣薄膜電晶體液晶顯示器產業協會(TTLA)會員承諾,於2010年全氟化物(PFCs)排放訂為每生產1平方公尺面板所排放的碳當量,不能超過0.0335公噸,亦即排放目標值訂為0.0335 MTCE / m2,因此有必要瞭解目前TFT-LCD廠所排放的碳當量是否合乎標準。故本研究將以不同世代TFT-LCD廠為例,依ISO 14064規範進行盤查,3.5代廠、4代廠、5代廠、6代廠、7.5代廠的溫室氣體排放量,藉由盤查結果了解生產過程中PFCs (SF6、NF3)的使用量,鑑定不同世代廠溫室氣體的排放源及排放強度,再進一步探討廠區間的差異性及其PFCs的減量策略。
研究結果顯示薄膜電晶體液晶顯示器生產過程中,主要排放源為外購電力所造成之間接排放,隨著玻璃基板面積增加,用電量比例明顯有增加趨勢,從3.5代廠用電量比例為63%,到7.5代廠用電量比例已增加至91%,其中以壓縮乾燥空氣所佔的比率最高,約佔19%,其他為Array前段製程設備用電比率亦達19%。而溫室氣體排放量則以乾蝕刻製程的SF6為主,其次為化學氣相沉積製程所使用的NF3及N2O。隨著玻璃基板面積增加,單位面積所排放之CO2當量明顯有下降趨勢,從3.5代廠的0.545MTCE / m2,到6代廠已降至0.078MTCE / m2;其單位面積PFCs排放當量也明顯有下降趨勢,從3.5代廠的0.1893 MTCE/ m2,到6代廠已降至0.007 MTCE / m2,研究結果中顯示TFT-LCD廠包含第5代廠以後,在PFCs排放當量上已符合TTLA協會所承諾,於2010年將PFCs排放比值降至的0.0335 MTCE / m2目標值。

In recent years, the effect on the global climate change caused by the greenhouse gas emission has gradually become more obvious and it has threatened the survival of animals, plants and human beings as well. The fourth evaluation report announced by IPCC on February 2, 2007 particularly stressed that the global average temperature increase is very likely caused by the anthropogenic greenhouse gases.
At present, the plane-monitor industry has been considered by Taiwan government as a crucial industry which was entitled as “Two Trillion, Twin Stars Advantage of The Core Industry”. As the production of optoelectronic industry continues growing,accompanying with the business opportunity of mass commercial products , the manufacturing process will not only consume massive resources and energy,but will also emit the greenhouse gases. This research instances different generations of TFT-LCD factories and refers the standard of ISO 14064 to estimate the amount of green-house gas emissions from G3.5, G4, G5, G6 and G7.5 generation of TFT-LCD factories. In this work the amount of PFCs(SF6 and NF3) used by these different generation industries will be evaluated in order to understaned the differences between these industries. Furthermore, the strategies of reducing the greenhouse gas emission will be investigated.
The results show that the major emission in the process of manufacturing thin-film transistor liquid-crystal display is due to the indirect emission caused by the usage of electric power. As the size of the glass foundation-plate increases,the consumption of electricity also increases as well. The emissions due to the electricity usage consisting of 63% of the gresshouse gas emissions for G3.5 factories. But this usage has increased to 91% for G7.5 industries. Among these electricity usage, the major portion is used to condense the dry air and the proportion is approximately 19%. The other major electricity usage is by Array manufacturing system which also consists approximately 19%. The emission of greenhouse gas mainly occurs from eclipsing and cutting process by using SF6. The next significant greehouse gases NF3 and N2O are related to the chemical gas deposition process. With the increase of the glass-plate size,the emission of CO2 per unit area has been reduced significantly from 0.545 MTCE/m2 of G3.5 generation to 0.078 MTCE/m2 of G6 generation. The PFCs emission per unit area also reduces from 0.1893 MTCE/m2 of G3.5 generation to 0.007 MTCE/m2 of G6 generation. In conclusion, this study indicates that G5 generation and the upper-scale generation can achieve the TTLA's target which TFT-LCD industries should regulate their PFCs emission per unit area below 0.0335 MTCE/m2 in 2010.
URI: http://hdl.handle.net/11455/5379
其他識別: U0005-0502200920404200
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