Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/5432
標題: 半導體業VOCs減量控制與環境衝擊之研究
A Study on the Relationship between VOCs Control and its Impact on Environment in the Semiconductor Industry
作者: 劉良億
Liu, Liang-Yi
關鍵字: 半導體製造;Semiconductor Industry;半導體製造業空氣污染管制及排放標準;揮發性有機廢氣;天然氣;沸石濃縮轉輪焚化系統;全球暖化;溫室氣體;二氧化碳排放;自燃溫度;減碳;Semiconductor Industry Air Pollutant Control and Emission Standards;Volatile Organic Compounds (VOCs);nature gas;Zeolite Rotary Adsorber with Thermal Oxidizer, global warming;greenhouse gases;carbon dioxide emission;autoignition temperature;cutting down carbon emission
出版社: 環境工程學系所
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摘要: 
自從行政院環保署在民國89年7月1日正式施行「半導體製造業空氣污染管制及排放標準」,嚴格管制晶圓製造所排放之空氣污染物後,半導體業紛紛設置了揮發性有機廢氣防制設施以符合法規排放要求,眾多防治技術中,以設置沸石濃縮轉輪焚化系統為大部分半導體業的首選,於是有了大量天然氣作為助燃的需求,而目前半導體業的沸石濃縮轉輪焚化系統在排放量與削減率的操作表現上優於法規要求甚多。
而在全球暖化嚴重的今日,全世界正為如何減少溫室氣體排放而努力的同時,半導體業又開始大量使用天然氣產生溫室氣體。溫室氣體中又以二氧化碳排放被最為重視,其產生絕大部分是因製造工業使用石化燃料,所以如何減碳就變成一個重要的課題。
沸石濃縮轉輪焚化系統以天然氣為助燃燃料,以焚化溫度比揮發性有機物質之自燃溫度高的情況下起氧化作用,以達減低揮發性有機廢氣的排放。但燃燒天然氣所產生的二氧化碳與被燒掉的揮發性有機廢氣所產生的二氧化碳排放,以減碳的觀點研究他們的關係就是本論文研究的重點,並且就實驗過程中沸石濃縮轉輪削減率下降之發現作說明。

After the Environmental Protection Administration of the the Executive Yuan formally executed the Semiconductor Industry Air Pollutant Control and Emission Standards on Jul/ 1/2000, they strictly controlled the emission of the air pollutant coming from the semiconductor manufacturing. Therefore the semiconductor manufacture continually set up the Volatile Organic Compounds (VOCS) Abatement Control System to meet with the emission regulation. Among many techniques of VOCs abated control, the installation of Zeolite Rotary Adsorber with Thermal Oxidizer is the first-best choice for most of the semiconductor industry.

With the requirement of large amount of nature gas supporting the combustion in Thermal Oxidizer and the semiconductor industry utilizes the Zeolite Rotary Adsorber with Thermal Oxidizer to operate the reduction of pollutant emission and enhanced cut down rate at present. And the result is much better the demand to the regulations cause of a lot of nature gas using.

However, today's global warming is becoming more and more serious, and the whole world is struggling for reducing the emission of greenhouse gases and Semiconductor Industry began to exhausting nature gas at same time . The emission of carbon dioxide of all the greenhouse gas is valued most. The carbon dioxide mostly results from the burning of the petrochemical fuel in Industry manufacture. Therefore, “how to cut down carbon dioxide emission” becomes a serious issue and goal for world wild.

The Zeolite Rotary Adsorber with Thermal Oxidizer utilities the nature gas as the combustion-supporting fuel to cut down the emission of VOCs while the incinerated temperature is higher than the autoignition temperature of VOCs and produce oxidized action in Thermal Oxidizer. Based on the point of cutting down carbon emission, I study on the emission of carbon dioxide, which comes from the burning of the nature gas and the VOCs's emission. Therefore the relation between them is the focus in my research, and gives an explanation about the detection of lowering the cut down rate of Zeolite Rotary Adsorber with Oxidizer during the process of the experiment.
URI: http://hdl.handle.net/11455/5432
其他識別: U0005-2008200800120600
Appears in Collections:環境工程學系所

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