Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56265
DC FieldValueLanguage
dc.contributor高玉駿zh_TW
dc.contributor楊祺雄zh_TW
dc.contributor.author林佳鋒zh_TW
dc.contributor.author戴俊傑zh_TW
dc.contributor.author王桂妙zh_TW
dc.contributor.author林明秀zh_TW
dc.contributor.author武東星zh_TW
dc.date2012-01zh_TW
dc.date.accessioned2014-06-06T09:05:36Z-
dc.date.available2014-06-06T09:05:36Z-
dc.identifier.urihttp://hdl.handle.net/11455/56265-
dc.description.abstract一種具蝕刻通道的磊晶結構包含一基板、一形成於該基板的緩衝犧牲層,及一形成於該緩衝犧牲層的磊晶層,該基板包括複數條自一頂面向下凹設的蝕刻通道,對應每一蝕刻通道還包括兩面界定該等蝕刻通道的斜面,該緩衝犧牲層包括複數分別形成於該基板頂面上的緩衝犧牲塊體,該磊晶層形成於該緩衝犧牲層上且蓋於該等蝕刻通道上,該磊晶層的底面與該等斜面共同圍繞界定呈倒三角形的蝕刻通道利用該等呈倒三角形的蝕刻通道,供濕式蝕刻溶液通入,以更快速地蝕刻該緩衝犧牲層,進而提高自該磊晶層移除該基板的效率。zh_TW
dc.language.isozh_TWzh_TW
dc.publisher材料科學與工程學系zh_TW
dc.relation.urihttp://twpat.tipo.gov.tw/tipotwoc/tipotwkmen_US
dc.title具蝕刻通道的磊晶結構及其製造方法zh_TW
dc.typePatentzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextno fulltext-
item.grantfulltextnone-
item.cerifentitytypePublications-
item.languageiso639-1zh_TW-
item.openairetypePatent-
Appears in Collections:材料科學與工程學系
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