DSpace CRIS
DSpace-CRIS consists of a data model describing objects of interest to Research and Development and a set of tools to manage the data. Standard DSpace is used to deal with publications and data sets, whereas DSpace-CRIS involves other CRIS entities: Researcher Pages, Projects, Organization Units and Second Level Dynamic Objects (single entities specialized by a profile, such as Journal, Prize, Event etc; because any profile can define its own set of properties and nested objects)
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Please use this identifier to cite or link to this item:
http://hdl.handle.net/11455/56265| DC Field | Value | Language |
|---|---|---|
| dc.contributor | 高玉駿 | zh_TW |
| dc.contributor | 楊祺雄 | zh_TW |
| dc.contributor.author | 林佳鋒 | zh_TW |
| dc.contributor.author | 戴俊傑 | zh_TW |
| dc.contributor.author | 王桂妙 | zh_TW |
| dc.contributor.author | 林明秀 | zh_TW |
| dc.contributor.author | 武東星 | zh_TW |
| dc.date | 2012-01 | zh_TW |
| dc.date.accessioned | 2014-06-06T09:05:36Z | - |
| dc.date.available | 2014-06-06T09:05:36Z | - |
| dc.identifier.uri | http://hdl.handle.net/11455/56265 | - |
| dc.description.abstract | 一種具蝕刻通道的磊晶結構包含一基板、一形成於該基板的緩衝犧牲層,及一形成於該緩衝犧牲層的磊晶層,該基板包括複數條自一頂面向下凹設的蝕刻通道,對應每一蝕刻通道還包括兩面界定該等蝕刻通道的斜面,該緩衝犧牲層包括複數分別形成於該基板頂面上的緩衝犧牲塊體,該磊晶層形成於該緩衝犧牲層上且蓋於該等蝕刻通道上,該磊晶層的底面與該等斜面共同圍繞界定呈倒三角形的蝕刻通道利用該等呈倒三角形的蝕刻通道,供濕式蝕刻溶液通入,以更快速地蝕刻該緩衝犧牲層,進而提高自該磊晶層移除該基板的效率。 | zh_TW |
| dc.language.iso | zh_TW | zh_TW |
| dc.publisher | 材料科學與工程學系 | zh_TW |
| dc.relation.uri | http://twpat.tipo.gov.tw/tipotwoc/tipotwkm | en_US |
| dc.title | 具蝕刻通道的磊晶結構及其製造方法 | zh_TW |
| dc.type | Patent | zh_TW |
| item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| item.cerifentitytype | Publications | - |
| item.languageiso639-1 | zh_TW | - |
| item.openairetype | Patent | - |
| Appears in Collections: | 材料科學與工程學系 | |
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