Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56352
標題: 微機電射頻開關
MICRO-ELECTRO MECHANICAL SYSTEMS RF SWITCH
作者: 戴慶良
Dai, Ching-Liang
陳盈良
劉茂誠
Chen, Ying-Liang
Liu, Mao-Chen
摘要: 
一種微機電射頻開關,其包括:一基體、一懸浮金屬薄膜、一介電層、至少一固定部、複數彈簧、一共平面波導線、一氧化層及至少一電感;該介電層係介於該基體與該懸浮金屬薄膜間,而每一彈簧之兩端係分別連結至該懸浮金屬薄膜及該固定部,當施加之電壓於該基體與該懸浮金屬薄膜間產生之靜電力大於該彈簧恢復力時,該懸浮金屬薄膜會受到靜電力之影響而與該基體吸附。其兼具插入損失低、隔離度高、成本低及功率消耗低之優點及功效。
URI: http://hdl.handle.net/11455/56352
Appears in Collections:機械工程學系所

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