Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56830
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dc.contributor.author楊錫杭zh_TW
dc.contributor.author俆姍姍zh_TW
dc.contributor.other國立中興大學精密工程研究所zh_TW
dc.contributor.otherNational Chung Hsing University,Graduate Institute of Precision Engineeringen_US
dc.date2011-1-21zh_TW
dc.date.accessioned2014-06-06T09:06:51Z-
dc.date.available2014-06-06T09:06:51Z-
dc.identifier.urihttp://hdl.handle.net/11455/56830-
dc.description.abstract本發明一種高數值孔徑微透鏡與其陣列之製法,主要是利用光穿透微透鏡後之散射效果,形成高數值孔徑透鏡之製法,在製程中,先以光阻熱熔(Reflow of Photoresist)法做出所需之微透鏡玻璃光罩結構,再以超過光阻之玻璃轉換溫度之高溫加熱,使得光阻表面能量趨近於最小,而形成近似球面的形狀,再以玻璃光罩形狀轉移之原理,在一基材上塗佈較厚的光阻層,即可得到高NA微透鏡陣列結構,其製程穩定且製作簡單,並可大量翻模複製,以大大降低製作成本。zh_TW
dc.language.isozh_TWzh_TW
dc.title高數值孔徑微透鏡與其陣列之製法zh_TW
dc.typePatentzh_TW
dc.contributor.catalogerMiao-zhen Luoen_US
item.languageiso639-1zh_TW-
item.openairetypePatent-
item.cerifentitytypePublications-
item.grantfulltextrestricted-
item.fulltextwith fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
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