Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56867
DC FieldValueLanguage
dc.contributor趙元寧zh_TW
dc.contributor.authorYANG, HSIHARNGen_US
dc.contributor.author楊錫杭zh_TW
dc.contributor.authorCHENG, WEI HSUANen_US
dc.contributor.author程偉烜zh_TW
dc.date2008-03zh_TW
dc.date.accessioned2014-06-06T09:06:55Z-
dc.date.available2014-06-06T09:06:55Z-
dc.identifier.urihttp://hdl.handle.net/11455/56867-
dc.description.abstract本發明係有關一種角錐微結構陣列製法,其包括一.預備步驟及二.微影成型步驟;本發明藉由微影曝光中,配合近接式曝光法以凹透鏡改變黃光入射光罩之透光孔的方向,使光阻層得以曝光呈現角錐型陣列結構之光阻;並透過製程參數之設定以及該光罩之透光孔的形狀,可穩定控制該角錐微結構之尺寸大小,進一步加以電鑄成形為微模仁,可進行量產射出製造;如此兼具可製造不同尺寸之角錐微結構陣列、製程穩定、生產設備成本低,以及導光性特佳等功效。zh_TW
dc.language.isoen_USzh_TW
dc.publisher精密工程研究所zh_TW
dc.relation.urihttp://twpat.tipo.gov.tw/tipotwoc/tipotwkmen_US
dc.title角錐微結構陣列製法zh_TW
dc.titleTRUNCATED PYRAMID ARRAY FABRICATION METHODen_US
dc.typePatentzh_TW
item.grantfulltextnone-
item.openairetypePatent-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
Appears in Collections:精密工程研究所
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