Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56875
DC FieldValueLanguage
dc.contributor趙元寧zh_TW
dc.contributor.author楊錫杭zh_TW
dc.contributor.authorYANG, HSIHARNGen_US
dc.contributor.author林宗鴻zh_TW
dc.contributor.author趙振綱zh_TW
dc.contributor.author林哲平zh_TW
dc.contributor.authorLIN, TSUNG HUNGen_US
dc.contributor.authorCHAO, CHING KONGen_US
dc.contributor.authorLIN, CHE PINGen_US
dc.date2007-03zh_TW
dc.date.accessioned2014-06-06T09:06:56Z-
dc.date.available2014-06-06T09:06:56Z-
dc.identifier.urihttp://hdl.handle.net/11455/56875-
dc.description.abstract本發明係有關一種橫躺半圓錐形光波導之製法,其包括:一.預備步驟、二.光罩放置步驟,以及三.微影成型步驟;本發明利用紫外光以不同間距穿過兩個不同高度之第一、第二梯形曝光孔後,照射一光阻層,配合繞射現象使此光阻層曝光產生出至少一個橫躺半圓錐形光波導;如此兼具製程穩定、控制尺寸相當準確、生產設備低成本,以及可射出製造等優點。zh_TW
dc.language.isoen_USzh_TW
dc.publisher精密工程研究所zh_TW
dc.relation.urihttp://twpat.tipo.gov.tw/tipotwoc/tipotwkmen_US
dc.title橫躺半圓錐形光波導之製法zh_TW
dc.titleMANUFACTURING METHOD OF A HORIZONTAL HEMI-FRUSTUM OPTICAL WAVEGUIDEen_US
dc.typePatentzh_TW
item.grantfulltextnone-
item.openairetypePatent-
item.cerifentitytypePublications-
item.languageiso639-1en_US-
item.fulltextno fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
Appears in Collections:精密工程研究所
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