Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/56879
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dc.contributor.author楊錫杭zh_TW
dc.contributor.authorYANG, HSI HARINGen_US
dc.contributor.author徐姍姍zh_TW
dc.contributor.authorHSU, SHAN SHANen_US
dc.date2007-01zh_TW
dc.date.accessioned2014-06-06T09:06:57Z-
dc.date.available2014-06-06T09:06:57Z-
dc.identifier.urihttp://hdl.handle.net/11455/56879-
dc.description.abstract本發明一種微環狀結構製法,係先以一光阻熱熔(Reflow of Photoresist)法製作所需微透鏡光罩,再以超過光阻之玻璃轉換溫度之高溫加熱,使光阻材料內分子動能增加,並受到表面張力作用,使得光阻表面能量趨近於最小,進而形成近似球面的形狀,而形成特殊之微透鏡光罩,並以此微透鏡光罩對正光阻作微影,即可藉由光穿透微透鏡後產生之散射效果,形成所需之微環狀結構,最後,以電鑄法製作模具,使該微環狀結構可供日後大量生產複製者。zh_TW
dc.language.isozh_TWzh_TW
dc.publisher精密工程研究所zh_TW
dc.relation.urihttp://twpat.tipo.gov.tw/tipotwoc/tipotwkmen_US
dc.title微環狀結構製法zh_TW
dc.typePatentzh_TW
item.grantfulltextnone-
item.openairetypePatent-
item.cerifentitytypePublications-
item.languageiso639-1zh_TW-
item.fulltextno fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
Appears in Collections:精密工程研究所
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