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標題: 高溫濕氧化對晶片內部微觀缺陷及其均勻性的影響
The Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Wafer
作者: 黃耀輝
Huang, Yaw Huei
關鍵字: Micro-defcets;微觀缺陷;Wet Oxidation;Nucleation anneal;Oxygen precipitate;溼氧化;孕核熱處理;氧凝聚物
出版社: 電機工程學系
Appears in Collections:電機工程學系所

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