Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/6381
DC FieldValueLanguage
dc.contributor.advisor貢中元zh_TW
dc.contributor.advisorKung Chung-Yuanen_US
dc.contributor.author黃耀輝zh_TW
dc.contributor.authorHuang, Yaw Hueien_US
dc.date1998zh_TW
dc.date.accessioned2014-06-06T06:38:01Z-
dc.date.available2014-06-06T06:38:01Z-
dc.identifier.urihttp://hdl.handle.net/11455/6381-
dc.language.isoen_USzh_TW
dc.publisher電機工程學系zh_TW
dc.subjectMicro-defcetsen_US
dc.subject微觀缺陷zh_TW
dc.subjectWet Oxidationen_US
dc.subjectNucleation annealen_US
dc.subjectOxygen precipitateen_US
dc.subject溼氧化zh_TW
dc.subject孕核熱處理zh_TW
dc.subject氧凝聚物zh_TW
dc.title高溫濕氧化對晶片內部微觀缺陷及其均勻性的影響zh_TW
dc.titleThe Effect of Wet Oxidation on the Micro-defects and their Radial Distribution in Cz Silicon Waferen_US
dc.typeThesis and Dissertationzh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.openairetypeThesis and Dissertation-
item.cerifentitytypePublications-
item.fulltextno fulltext-
item.languageiso639-1en_US-
item.grantfulltextnone-
Appears in Collections:電機工程學系所
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