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http://hdl.handle.net/11455/66935| 標題: | 一種複合薄膜之微氣體感測裝置及其結構 A COMPOSITE THIN FILM MICRO GAS SENSOR AND ITS STRUCTURE |
作者: | 戴慶良 DAI, CHING LIANG 陳彥崎 CHEN, YEN CHI |
摘要: | 一種複合薄膜之微氣體感測裝置及其結構,分為電阻式與電容式。其中該電阻式的複合薄膜之微氣體感測裝置,係為利用電阻變化來測量待測氣體的分子濃度變化量,該電阻式的複合薄膜之微氣體感測裝置包含:一複合薄膜、一電阻式微氣體感測器及一放大電路。而電容式的複合薄膜之微氣體感測裝置,係為利用電容變化來測量待測氣體的分子濃度變化量,該電容式的複合薄膜之微氣體感測裝置包含:一複合薄膜、一電容式微氣體感測器及一震盪電路。 |
URI: | http://hdl.handle.net/11455/66935 |
| Appears in Collections: | 專利 |
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