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標題: Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering
作者: Tsai, D.C.
Huang, Y.L.
Lin, S.R.
Liang, S.C.
Shieu, F.S.
關鍵字: Coating materials;Nitride materials;Thin films;Vapor deposition;Crystal structure;Microstructure;titanium chromium nitride;tin films;preferred orientation;thin-films;microstructure;hardness;temperature;dependence;deposition;alloys
Project: Applied Surface Science
期刊/報告no:: Applied Surface Science, Volume 257, Issue 4, Page(s) 1361-1367.
This study reports the influence of growth conditions on the characteristics of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering at various N(2)-to-total (N(2) + Ar) flow ratio, which is RN. The crystal structures, microstructure, and mechanical properties for different RN were characterized by electron spectroscopy for chemical analysis, X-ray diffraction, atomic force microscopy, field-emission-scanning electron microscopy, transmission electron microscopy, and nanoindentation. The results indicate that the TiVCrZrY alloy and nitride coatings have hexagonal close-packed (hcp)-type and sodium chloride (NaCl)-type solid-solution structures, respectively. The voids in the coatings are eliminated and the growth of the columnar crystal structures is inhibited along with an increasing RN. As a consequence, highly packed equiaxed amorphous structures with smooth surfaces are formed. The coatings accordingly achieved a pronounce hardness of 17.5 GPa when R(N) = 100%. (C) 2010 Elsevier B.V. All rights reserved.
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.08.078
Appears in Collections:工學院

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