Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/67612
DC FieldValueLanguage
dc.contributor.authorShiao, M.H.en_US
dc.contributor.author薛富盛zh_TW
dc.contributor.authorChang, Z.C.en_US
dc.contributor.authorShieu, F.S.en_US
dc.date2003zh_TW
dc.date.accessioned2014-06-11T05:53:43Z-
dc.date.available2014-06-11T05:53:43Z-
dc.identifier.issn0013-4651zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/67612-
dc.description.abstractThe microstructure and chemistry of macroparticles in CrN films prepared by an arc ion-plating method on AISI 304 stainless steel was characterized by an energy filtering transmission electron microscope (TEM) equipped with an electron energy loss spectroscopy (EELS) detector. The surface morphology of the CrN coatings with macroparticles was examined by a high-resolution field emission scanning electron microscope (SEM). SEM observation shows that the macroparticles lie on craters and protrude out of the coating surface. Cross-sectional and plan-view TEM results reveal that the macroparticles are bud shape, which has the Cr metal located at the bottom center and surrounded by a chromium nitride layer. Quantitative EELS analysis of a macroparticle from the core region to the outer shell shows that the nitrogen and oxygen concentrations in the macroparticle increase from 17.7 to 38 atom % and 7.7 to 9.5 atom %, respectively. On the basis of the analysis, a model describing the formation of macroparticles in the arc ion-plated CrN coatings is proposed. (C) 2003 The Electrochemical Society.en_US
dc.language.isoen_USzh_TW
dc.relationJournal of the Electrochemical Societyen_US
dc.relation.ispartofseriesJournal of the Electrochemical Society, Volume 150, Issue 5, Page(s) C320-C324.en_US
dc.relation.urihttp://dx.doi.org/10.1149/1.1564107en_US
dc.subjectevaporated tin filmsen_US
dc.subjectvacuum-arcen_US
dc.subjectdepositionen_US
dc.subjectcoatingsen_US
dc.subjectcontaminationen_US
dc.subjectplasmaen_US
dc.titleCharacterization and formation mechanism of macroparticles in arc ion-plated CrN thin filmsen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1149/1.1564107zh_TW
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.fulltextno fulltext-
item.grantfulltextnone-
item.cerifentitytypePublications-
item.languageiso639-1en_US-
item.openairetypeJournal Article-
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