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標題: Characterization of the arc ion-plated CrN coatings oxidized at elevated temperatures
作者: Hsieh, W.P.
Wang, W.C.
Wang, C.C.
Shieu, F.S.
關鍵字: nitride coatings;oxidation;tin;behavior;films;microstructure
Project: Journal of Vacuum Science & Technology A
期刊/報告no:: Journal of Vacuum Science & Technology A, Volume 19, Issue 5, Page(s) 2235-2243.
Microstructure and chemistry of the are ion-plated CrN coatings oxidized in air at temperatures ranging from 300 to 800 degreesC for 60 min were analyzed by x-ray diffraction (XRD), transmission electron microscopy (TEM), electron energy loss spectroscopy (EELS), and Auger electron spectroscopy (AES). The CrN coatings were prepared by cathodic arc ion plating deposition on a type 304 stainless steel with a Cr interlayer. The XRD result shows that oxidation of the CrN-coated steel above 500 degreesC produces two new phases, Cr(2)O(3) and beta -Cr(2)N, and the amount of both phases increases with the oxidation temperature. Cross-section TEM shows three distinct regions including the steel substrate, the Cr interlayer, and the CrN coating in the as-deposited specimen, in which the CrN layer exhibits a columnar structure and preferred orientation. Oxidation of the CrN-coated steel at high temperatures produces an oxide layer, Cr(2)O(3), on the coating surface, and the underlayer is a mixture of CrN and,beta -Cr(2)N phases. Unlike the as-deposited specimen, the dual phase layer in the oxidized specimens has an equiaxed grain structure and the average grain size of the layer increases with the oxidation temperature. In addition, pronounced grain growth in the dual phase layer near the coating surface is observed in the specimen heat-treated at 800 degreesC. Elemental analyses of the CrN coating near the free surface by EELS and AES reveal that the O/N ratio of the coating and the thickness of the oxide layer increase with the oxidation temperature. (C) 2001 American Vacuum Society.
ISSN: 0734-2101
DOI: 10.1116/1.1382877
Appears in Collections:工學院

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