Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/67632
標題: Formation of macroparticles in are ion-plated nitride coatings
作者: Shiao, M.H.
薛富盛
Shieu, F.S.
關鍵字: vacuum arcs;films;tin
Project: Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films
期刊/報告no:: Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films, Volume 19, Issue 2, Page(s) 703-705.
摘要: 
On the basis of transmission electron microscope analysis, a model describing the formation of macroparticles in are ion-plated nitride coatings is proposed. While emitting from the cathode, the metal droplets react with nitrogen during their travel to the substrate and form a thin layer of nitrides on the surface of the droplets, resulting in a core-shell structure. The flattened torus voids are gradually produced beneath each droplet upon impact on the substrate, which causes shadowing of the ion flute during deposition. Subsequent growth of the nitride coating on the droplets follows the orientation of the nitride nuclei in the outer shell to form a radial type of structure, until coalescence with the regular nitride columns growing perpendicular to the substrate surface occurs. (C) 2001 American Vacunm Society.
URI: http://hdl.handle.net/11455/67632
ISSN: 0734-2101
DOI: 10.1116/1.1351066
Appears in Collections:工學院

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