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標題: Effects of CPII implantation on the characteristics of diamond-like carbon films
作者: Chen, Y.C.
Weng, K.W.
Chao, C.H.
Lien, S.Y.
Han, S.
Chen, T.L.
Lee, Y.C.
Shih, H.C.
Wang, D.Y.
關鍵字: Diamond-like carbon (DLC);Filter arc deposition (FAD);Surface;properties;ion-implantation
Project: Applied Surface Science
期刊/報告no:: Applied Surface Science, Volume 255, Issue 16, Page(s) 7216-7220.
A diamond-like carbon film (DLC) was successfully synthesized using a hybrid PVD process, involving a filter arc deposition source (FAD) and a carbon plasma ion implanter (CPII). A quarter-torus plasma duct filter markedly reduced the density of the macro-particles. Graphite targets were used in FAD. Large electron and ion energies generated from the plasma duct facilitate the activation of carbon plasma and the deposition of high-quality DLC films. M2 tool steel was pre-implanted with 45 kV carbon ions before the DLC was deposited to enhance the adhesive and surface properties of the film. The ion mixing effect, the induction of residual stress and the phase transformation at the interface were significantly improved. The hardness of the DLC increased to 47.7 GPa and 56.5 GPa, and the wear life was prolonged to over 70 km with implantation fluences of 1 x 1017 ions/cm(2) and 2 x 10(17) ions/cm(2), respectively. (C) 2009 Elsevier B. V. All rights reserved.
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.03.067
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