Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/68679
DC FieldValueLanguage
dc.contributor.authorLin, Y.H.en_US
dc.contributor.authorLin, H.D.en_US
dc.contributor.authorLiu, C.K.en_US
dc.contributor.authorHuang, M.W.en_US
dc.contributor.authorChen, J.R.en_US
dc.contributor.authorShih, H.C.en_US
dc.date2010zh_TW
dc.date.accessioned2014-06-11T05:57:10Z-
dc.date.available2014-06-11T05:57:10Z-
dc.identifier.issn0925-9635zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/68679-
dc.description.abstractThis work presents a simple approach for the synthesis of multilayered titanium-diamond-like carbon (multilayered Ti-DLC) films on a Si substrate by a filtered cathodic vacuum arc (FCVA) system using Ti-coated graphite target to supply carbon as well as the dopant titanium. This study focuses on the characterization of microstructure, surface roughness, mechanical strength and electrical resistivity. The results indicated that the multilayered Ti-DLC films exhibit better mechanical properties than the Ti-free and Ti-implanted DLC films, and both multilayered Ti- and Ti-implanted DLC films have similar Ti atomic concentrations. The surface roughness of the multilayered Ti-DLC films shows a value much lower than the other films. The film microstructure consists in TiC nanocrystals precipitated in the amorphous carbon matrix with a multilayered structure. Because of the high hardness and low roughness, the multilayered Ti-DLC films can be used as biomedical, wear-resistant and solid lubricant coatings. (C) 2010 Published by Elsevier B.V.en_US
dc.language.isoen_USzh_TW
dc.relationDiamond and Related Materialsen_US
dc.relation.ispartofseriesDiamond and Related Materials, Volume 19, Issue 7-9, Page(s) 1034-1039.en_US
dc.relation.urihttp://dx.doi.org/10.1016/j.diamond.2010.02.014en_US
dc.subjectDiamond-like carbon (DLC)en_US
dc.subjectTi-DLCen_US
dc.subjectFiltered cathodic vacuum arc (FCVA)en_US
dc.subjectdiamond-like carbonen_US
dc.subjecttetrahedral amorphous-carbonen_US
dc.subjectcathodic vacuum-arcen_US
dc.subjectc-n filmsen_US
dc.subjectmechanical-propertiesen_US
dc.subjectnanocomposite filmsen_US
dc.subjection-implantationen_US
dc.subjectfield-emissionen_US
dc.subjectdepositionen_US
dc.subjectcathodoluminescenceen_US
dc.titleStructure and characterization of the multilayered Ti-DLC films by FCVAen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1016/j.diamond.2010.02.014zh_TW
item.openairetypeJournal Article-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextnone-
item.fulltextno fulltext-
item.cerifentitytypePublications-
item.languageiso639-1en_US-
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