Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/68680
DC FieldValueLanguage
dc.contributor.authorWang, D.Y.en_US
dc.contributor.authorWeng, K.W.en_US
dc.contributor.authorHwang, S.Y.en_US
dc.date2000zh_TW
dc.date.accessioned2014-06-11T05:57:10Z-
dc.date.available2014-06-11T05:57:10Z-
dc.identifier.issn0925-9635zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/68680-
dc.description.abstractIn this study, we developed a novel method of synthesizing metal-doped diamond-like carbon films (DLC) using the cathodic are evaporation (CAE) process. Intense Cr plasma energy activated the decomposition of hydrocarbon source gas C2H2 to form a metal-doped amorphous carbon film on steel substrates. We deposited a Cr interlayer to prevent interdiffusion between DLC and the steel substrates. When the C2H2 partial pressure is higher than 1.3 Pa, the deposition reaction switched from Cr3C2 to DLC formation. The result is a hydrogenated DLC thin film possessing excellent microhardness as high as 3824 Hv(25g), and for which the incorporation of a Cr interface and Cr doping in the DLC matrix ensure film ductility and sufficient film adhesion. We employed Raman spectroscopy to evaluate the influences of reactive gas flow and substrate bias on the DLC composition; we carried out the microstructure and mechanical property measurements by scanning electron microscopy (SEM), X-ray diffraction (XRD), glow discharge optical spectroscopy (GDS) and wear tests. (C) 2000 Elsevier Science S.A. All rights reserved.en_US
dc.language.isoen_USzh_TW
dc.relationDiamond and Related Materialsen_US
dc.relation.ispartofseriesDiamond and Related Materials, Volume 9, Issue 9-10, Page(s) 1762-1766.en_US
dc.relation.urihttp://dx.doi.org/10.1016/s0925-9635(00)00294-6en_US
dc.subjectdiamond-like carbonen_US
dc.subjectcathodic arc evaporationen_US
dc.subjecthard coatingen_US
dc.subjectdlc coatingsen_US
dc.titleStudy on metal-doped diamond-like carbon films synthesized by cathodic arc evaporationen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1016/s0925-9635(00)00294-6zh_TW
item.grantfulltextnone-
item.openairetypeJournal Article-
item.cerifentitytypePublications-
item.languageiso639-1en_US-
item.fulltextno fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
Appears in Collections:期刊論文
Show simple item record
 

Google ScholarTM

Check

Altmetric

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.