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標題: Fabrication of Microstructure Arrays on Photosensitive Glass by Femtosecond Laser
作者: Wan, P.N.
Cheng, C.W.
Huang, H.W.
Chen, J.S.
關鍵字: femtosecond laser;photosensitive glass;microstructures;UV curing;microlens arrays;photoetchable glass;foturan
Project: Journal of Laser Micro Nanoengineering
期刊/報告no:: Journal of Laser Micro Nanoengineering, Volume 7, Issue 1, Page(s) 122-125.
A maskless technique for the fabrication of U-shaped microstructure arrays on the surface of photosensitive glass by femtosecond laser-induced modification is developed. This technique is followed by heat treatment to crystallize the modified area, and the specimen is then placed in acid solution for chemical etching. The surface roughness of the microstructures is further improved by a secondary annealing process. The fabricated photosensitive glass is used as a mold template, and replicated plano-convex cylindrical arrays by UV-replica are also presented. The focusing ability of the microlens arrays on the glass mold and replicate is demonstrated. DOI: 10.2961/jlmn.2012.01.0024
ISSN: 1880-0688
DOI: 10.2961/jlmn.2012.01.0024
Appears in Collections:期刊論文

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