Please use this identifier to cite or link to this item:
|標題:||Micro/Nano-structures Formation on ITO Thin Film Irradiated by Different Femtosecond Laser Wavelengths||作者:||Cheng, C.W.
|關鍵字:||femtosecond laser;ITO;crystalline;patterning;heat accumulation;effect||Project:||Journal of Laser Micro Nanoengineering||期刊/報告no：:||Journal of Laser Micro Nanoengineering, Volume 5, Issue 3, Page(s) 213-217.||摘要:||
This study presented the fabrication of micro/nano crystalline indium tin oxide (c-ITO) patterns on glass substrate using a femtosecond laser-induced crystallization followed by chemical etching. In the proposed approach, an amorphous ITO (a-ITO) thin film was transformed into a c-ITO micro/nano structure over a predetermined area using femtosecond laser beam irradiation, under two different wavelengths, 1064 nm and 532 nm, of 1 MHz repetition rate femtosecond fiber laser. The residual a-ITO thin film was removed by an etchant solution, in order to form a uniform c-ITO pattern. The formation was due to the heat accumulation effect provided by the high-repetition rate of the femtosecond laser pulses. When the laser power approached the ablation threshold of the a-ITO thin film, periodic-like c-ITO nanostructures with one-quarter of the irradiation laser wavelength were formed by linearly-polarized laser beam irradiation.
|Appears in Collections:||期刊論文|
Show full item record
TAIR Related Article
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.