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標題: Micro/Nano-structures Formation on ITO Thin Film Irradiated by Different Femtosecond Laser Wavelengths
作者: Cheng, C.W.
Lee, I.M.
Shen, W.C.
Lin, C.Y.
Chen, J.S.
關鍵字: femtosecond laser;ITO;crystalline;patterning;heat accumulation;effect
Project: Journal of Laser Micro Nanoengineering
期刊/報告no:: Journal of Laser Micro Nanoengineering, Volume 5, Issue 3, Page(s) 213-217.
This study presented the fabrication of micro/nano crystalline indium tin oxide (c-ITO) patterns on glass substrate using a femtosecond laser-induced crystallization followed by chemical etching. In the proposed approach, an amorphous ITO (a-ITO) thin film was transformed into a c-ITO micro/nano structure over a predetermined area using femtosecond laser beam irradiation, under two different wavelengths, 1064 nm and 532 nm, of 1 MHz repetition rate femtosecond fiber laser. The residual a-ITO thin film was removed by an etchant solution, in order to form a uniform c-ITO pattern. The formation was due to the heat accumulation effect provided by the high-repetition rate of the femtosecond laser pulses. When the laser power approached the ablation threshold of the a-ITO thin film, periodic-like c-ITO nanostructures with one-quarter of the irradiation laser wavelength were formed by linearly-polarized laser beam irradiation.
ISSN: 1880-0688
DOI: 10.2961/jlmn.2010.03.0006
Appears in Collections:期刊論文

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