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|標題:||A micromachined resistive-type humidity sensor with a composite material as sensitive film||作者:||Su, P.G.
|關鍵字:||MEMS;humidity microsensor;composite material;sensing properties;electrical-properties;poly(2-acrylamido-2-methylpropane sulfonate);thin-films;sodium;sio2||Project:||Sensors and Actuators B-Chemical||期刊/報告no：:||Sensors and Actuators B-Chemical, Volume 113, Issue 2, Page(s) 837-842.||摘要:||
A novel resistive-type humidity microsensor was fabricated by a microelectromechanical system (MEMS) technology and thick-film technology. The microsensor was composed of a suspended planar membrane bridged to the base silicon substrate with two beams. Metal electrodes were deposited on the surface of the membrane, and a composite film of poly-[3-(methacryloylamino)propyl] trimethyl ammonium chloride and SiO2 (PMAPTAC/SiO2) was coated as a humidity-sensing material on the top of the electrodes. The humidity-sensing principle of the sensor was based on the conductivity change of coated composite film upon adsorption/desorption of water vapor. The logarithmic impedance of the microsensor measured at 1 kHz decreased linearly with increasing the humidity in the range of 30-90%RH. The applied voltage above I V did not influence the humidity response of the microsensor. The maximum difference between humidification and desiccation process was 5.1%RH at 30%RH. The influence of temperature was -0.72%RH/degrees C on average in the temperature range 15-25 degrees C and the humidity range of 30-90%RH. (c) 2005 Elsevier B.V. All Rights reserved.
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