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標題: Effects of titanium-implanted pre-treatments on the residual stress of TiN coatings on high-speed steel substrates
作者: Chang, C.L.
Jao, J.Y.
Ho, W.Y.
Wang, D.Y.
關鍵字: residual stress;metal plasma ion implantation;TiN coating;adhesion;strength;high-temperature oxidation;aluminum ion-implantation;thin-film;pvd;microstructure;alloys;growth;nickel
Project: Surface & Coatings Technology
期刊/報告no:: Surface & Coatings Technology, Volume 201, Issue 15, Page(s) 6702-6706.
This investigation examined how titanium ion implantation pre-treatment affects the residual stress of TiN coatings on M2 high-speed steel. Ions were implanted by metal plasma ion implantation. The adhesion strength of the TiN coatings was enhanced by pre-treatment that implanted Ti into the M2 tool steel substrate. The implanted substrate functioned as a buffer layer between the deposited TiN and the tool steel substrate, resulting in variations of the residual stress. The residual stress determined by glancing-angle XRD demonstrates that the deposited TiN films on ion-implanted substrates exhibited reduced compressive stress, from -3.95 to -2.41 GPa, which corresponded to a decrease in the grain size of the TiN films. The texture of the TiN film was clearly transformed from the preferred orientation of (220) to (I 11), subsequently enhancing wear resistance against a tungsten ball. (c) 2006 Elsevier B.V. All rights reserved.
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2006.09.035
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