Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/71366
標題: Mechanical properties, deformation behaviors and interface adhesion of (AlCrTaTiZr)N-x multi-component coatings
作者: Chang, S.Y.
Lin, S.Y.
Huang, Y.C.
Wu, C.L.
關鍵字: Hard coatings;Nanoindentation;Deformation;Interface adhesion;beam-assisted deposition;entropy alloy system;multiprincipal elements;thin-films;tin films;nitride;indentation;hardness;ion;stability
Project: Surface & Coatings Technology
期刊/報告no:: Surface & Coatings Technology, Volume 204, Issue 20, Page(s) 3307-3314.
摘要: 
In this study, (AlCrTaTiZr)N-x multi-component coatings with quinary metallic elements were developed as protective hard coatings for tribological application. The mechanical properties, creep behaviors, deformation mechanisms and interface adhesion of the (AlCrTaTiZr)N-x coatings with different N contents were characterized. With increasing the N-2-to-total (N-2 + Ar) flow ratio, R-N, during sputtering deposition, the (AlCrTaTiZr)Nx coatings transformed from an amorphous metallic phase to a nanocomposite and finally a crystalline nitride structure. The hardness of the coatings accordingly increased from 13 GPa to a high value of about 30 GPa, but the creep strain rate also increased from 1.3 x 10(-4) to 7.3 x 10(-4) 1/s. The plastic deformation of the amorphous metallic coating deposited with R-N = 0% proceeded through the formation and extension of shear bands, whereas dislocation activities dominated the deformation behavior of the crystalline nitride coatings deposited with R-N = 10% and 30%. With increasing R-N, the interface adhesion energy between the coatings and the substrates was also enhanced from 6.1 to 22.9 J/m(2). (C) 2010 Elsevier B.V. All rights reserved.
URI: http://hdl.handle.net/11455/71366
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2010.03.041
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