Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/71370
DC FieldValueLanguage
dc.contributor.authorChiang, C.M.en_US
dc.contributor.authorChang, L.S.en_US
dc.date2005zh_TW
dc.date.accessioned2014-06-11T06:01:17Z-
dc.date.available2014-06-11T06:01:17Z-
dc.identifier.issn0257-8972zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/71370-
dc.description.abstractThe influences of the deposition parameters on the properties of aluminum oxide thin films deposited on copper substrates by reactive RE magnetron sputtering with an aluminum target are investigated in this study. The base pressure and argon flow rate were fixed at 8 mTorr and 10 sccm, respectively. The microstructure, composition and oxidation behavior of the aluminum oxide films were characterized respectively by transmission electron microscopy, Auger electron spectrometer and derivative thermogravimetty. It was found that an excellent aluminum oxide coating is obtained when the power density is 15 W/cm(2) and the oxygen flow rate is 3 sccm. An increase in the RE power leads to a dense crystalline structure and a slight decrease in the oxygen/aluminum atomic ratio in the deposited film. Oxygen flow rate higher than 3 sccm causes porous structure of thin films. The properties of thin films are thought to be related to the target poisoning and the degree of ionization of gas atoms in different RF power densities and oxygen flow rates. (c) 2005 Published by Elsevier B.V.en_US
dc.language.isoen_USzh_TW
dc.relationSurface & Coatings Technologyen_US
dc.relation.ispartofseriesSurface & Coatings Technology, Volume 198, Issue 1-3, Page(s) 152-155.en_US
dc.relation.urihttp://dx.doi.org/10.1016/j.surfcoat.2004.10.129en_US
dc.subjectthin filmsen_US
dc.subjectaluminum oxideen_US
dc.subjectRE reactive sputteringen_US
dc.subjectcopperen_US
dc.subjectTEMen_US
dc.subjectDTGen_US
dc.subjectdepositionen_US
dc.titleMicrostructure and characterization of aluminum oxide thin films prepared by reactive RE magnetron sputtering on copperen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1016/j.surfcoat.2004.10.129zh_TW
item.languageiso639-1en_US-
item.openairetypeJournal Article-
item.cerifentitytypePublications-
item.grantfulltextnone-
item.fulltextno fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
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