Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/71503
DC FieldValueLanguage
dc.contributor.authorSung, S.L.en_US
dc.contributor.authorGuo, X.J.en_US
dc.contributor.authorHuang, K.P.en_US
dc.contributor.authorChen, F.R.en_US
dc.contributor.authorShih, H.C.en_US
dc.date1998zh_TW
dc.date.accessioned2014-06-11T06:01:47Z-
dc.date.available2014-06-11T06:01:47Z-
dc.identifier.issn0040-6090zh_TW
dc.identifier.urihttp://hdl.handle.net/11455/71503-
dc.description.abstractDiamond-like carbon (DLC) coatings were successfully produced on the silicon wafer by a microwave plasma enhanced chemical vapor deposition (MPECVD) with the precursor gases of methane, hydrogen and argon. High resolution transmission electron microscopy (HRTEM) was applied to analyze the nano-particles in the coating. Both diamond and silicon carbide (SiC) nano-clusters of sizes ranging from 2 to 5 nm were observed in the DLC films. The dispersion of nano-clusters of diamond and SiC improves the film quality in terms of crystallinity and hardness of the DLC coating significantly. (C) 1998 Elsevier Science S.A.en_US
dc.language.isoen_USzh_TW
dc.relationThin Solid Filmsen_US
dc.relation.ispartofseriesThin Solid Films, Volume 315, Issue 1-2, Page(s) 345-350.en_US
dc.relation.urihttp://dx.doi.org/10.1016/s0040-6090(97)00782-7en_US
dc.subjectdiamond-like carbonen_US
dc.subjectsiliconen_US
dc.subjectmicrowave plasma enhanced chemical vaporen_US
dc.subjectdepositionen_US
dc.subjectdiamond-like carbonen_US
dc.subjectamorphous-carbonen_US
dc.subjectmicrowave plasmaen_US
dc.subjecthydrogen gasen_US
dc.subjectdc biasen_US
dc.subjectdepositionen_US
dc.subjectnucleationen_US
dc.subjectdischargeen_US
dc.subjectmethaneen_US
dc.titleThe strengthening mechanism of DLC film on silicon by MPECVDen_US
dc.typeJournal Articlezh_TW
dc.identifier.doi10.1016/s0040-6090(97)00782-7zh_TW
item.grantfulltextnone-
item.openairetypeJournal Article-
item.cerifentitytypePublications-
item.languageiso639-1en_US-
item.fulltextno fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
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