Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/72216
標題: 加蓋複晶矽蝕刻邊牆護膜的去除
Removal+of+Sidewall+Passivation+Films+for+Capped+Polysilicon+Etching
作者: 戴鴻昌
鍾美華
陳禮廷
貢中元
關鍵字: Sidewall passivation films;Etching;Polysilicon;Removal
出版社: 國立中興大學工學院;Airiti Press Inc.
Project: 興大工程學報, Volume 6, Issue 1, Page(s) 1-4.
URI: http://hdl.handle.net/11455/72216
ISSN: 1017-4397
Appears in Collections:第06卷 第1期
工學院

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