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標題: Phase+Transformation+of+Metallic+Nanoparticles+for+Next+Generation+Microelectronic+Interconnections
作者: 高子軒
關鍵字: Metallic nanoparticle;金屬奈米粒子;Nanosized effect;Phase transformation;Alloying;奈米尺度效應;相變態;合金化
出版社: 國立中興大學工學院;Airiti Press Inc.
Project: 興大工程學刊, Volume 21, Issue 2, Page(s) 72-80.
By utilizing the drastically reduced melting temperature of nano-sized particles (NPs), one of recent developments in microelectronic packaging is to manufacture highly conductive interconnections with metallic nanoparticle deposits subjected to a low temperature process. With the emerging technology of inkjet printing system, nano-size metallic NP suspensions can be applied to fabricate electrical line patterns without using conventional lithography. For the transportation of power and signal, the nanoparticle deposits should be consolidated and well jointed with the contacts of the devices. This study systematically investigated the low temperature melting, solidification and alloying of Au or Ag3Au nanoparticle deposits. The interaction between the metallic NPs and electronic substrates will be also explored. By doing so, the phase transformation issues such as the supercooling, latent heat difference, and driving force for solidification resulted from nanosized effects will be well understood.

ISSN: 1017-4397
Appears in Collections:第21卷 第2期

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