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標題: 三五族pHEMT之電性分析與量測
Electrical Analysis and Measurement of Ⅲ-ⅤCompound pHEMT
作者: 韓季霖
Han, Chi-Lin
關鍵字: HEMT;高電子遷移率電晶體;TCAD simulation;Ⅲ-Ⅴ compound;high-speed electronics;模擬;三五族;高速電子元件
出版社: 電機工程學系所
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本研究使用TCAD模擬軟體進行元件模擬,以研究pHEMT元件直流特性與材料結構之關係。本研究所模擬之蕭基層/通道層/緩衝層材料結構有三種,其分別為AlGaAs/GaAs/GaAs、AlGaAs/InGaAs/GaAs與AlGaAs/InGaAs/AlGaAs。結果顯示在通道層以InGaAs取代GaAs,能增加二維電子氣濃度與提升元件電性表現。在緩衝層以AlGaAs取代GaAs,能增加緩衝層接面之導帶不連續情形。本研究也量測了一個實際pHEMT,其臨界電壓為0.43V,以及在VDS= 1.0V之最大轉導為320mS。

Ⅲ-Ⅴ compound semiconductor devices are key parts of RF communication applications because they have advantages of high electron mobility, high working frequency, low RF loss, high linearity and low noise. It is so-called “pHEMT” for full name “Pseudomorphic High Electron Mobility Transistor”. It becomes the important modern RF active device as it has some characteristics: small size, low threshold voltage, low power consumption and less process requirements.
In this study, device simulations were performed by TCAD simulators to research relationship between pHEMT DC characteristics and material structures. Three kinds of Schottky layer/channel layer/buffer layer material structures were simulated. They were AlGaAs/GaAs/GaAs, AlGaAs/InGaAs/GaAs and AlGaAs/InGaAs/AlGaAs, respectively. The result indicated that device electrical performance improved and 2DEG increased in channel layer which was replaced GaAs by InGaAs. Replacing GaAs by AlGaAs in buffer layer could increase conduction band discontinuousness at buffer layer junction. A actual pHEMT was also measured in this study. The threshold voltage of the pHEMT was 0.43V. The maximum transconductance was 320mS when VDS was 1.0V.
It is possible to predict device characteristics with TCAD simulation before fabrication. The study results can be reference for future TCAD simulations to make physics models simulated corresponding with device characteristics measured. Then we can proceed with parameters analysis, database modeling and improve high frequency device design efficiency and quality.
其他識別: U0005-1908200913193300
Appears in Collections:電機工程學系所

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