Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/86250
標題: An acetone microsensor with a ring oscillator circuit fabricated using the commercial 0.18 μm CMOS process
作者: Yang, Ming-Zhi
Dai, Ching-Liang
Shih, Po-Jen
Project: Sensors (Basel, Switzerland), Volume 14, Issue 7, Page(s) 12735-47.
摘要: 
This study investigates the fabrication and characterization of an acetone microsensor with a ring oscillator circuit using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The acetone microsensor contains a sensitive material, interdigitated electrodes and a polysilicon heater. The sensitive material is α-Fe2O3 synthesized by the hydrothermal method. The sensor requires a post-process to remove the sacrificial oxide layer between the interdigitated electrodes and to coat the α-Fe2O3 on the electrodes. When the sensitive material adsorbs acetone vapor, the sensor produces a change in capacitance. The ring oscillator circuit converts the capacitance of the sensor into the oscillation frequency output. The experimental results show that the output frequency of the acetone sensor changes from 128 to 100 MHz as the acetone concentration increases 1 to 70 ppm.
URI: http://hdl.handle.net/11455/86250
ISSN: 1424-8220
DOI: 10.3390/s140712735
Appears in Collections:機械工程學系所

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