Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/86254
標題: Sol-Gel Zinc Oxide Humidity Sensors Integrated with a Ring Oscillator Circuit On-a-Chip
作者: Yang, Ming-Zhi
Dai, Ching-Liang
Wu, Chyan-Chyi
Project: Sensors, Volume 14, Issue 11, Page(s) 20360-20371.
摘要: 
The study develops an integrated humidity microsensor fabricated using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The integrated humidity sensor consists of a humidity sensor and a ring oscillator circuit on-a-chip. The humidity sensor is composed of a sensitive film and branch interdigitated electrodes. The sensitive film is zinc oxide prepared by sol-gel method. After completion of the CMOS process, the sensor requires a post-process to remove the sacrificial oxide layer and to coat the zinc oxide film on the interdigitated electrodes. The capacitance of the sensor changes when the sensitive film adsorbs water vapor. The circuit is used to convert the capacitance of the humidity sensor into the oscillation frequency output. Experimental results show that the output frequency of the sensor changes from 84.3 to 73.4 MHz at 30 °C as the humidity increases 40 to 90%RH.
URI: http://hdl.handle.net/11455/86254
ISSN: 1424-8220
1424-8220
DOI: 10.3390/s141120360
Appears in Collections:機械工程學系所

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