Please use this identifier to cite or link to this item: http://hdl.handle.net/11455/86256
標題: Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process
作者: Tseng, Jian-Zhi
Wu, Chyan-Chyi
Dai, Ching-Liang
Project: Sensors, Volume 14, Issue 4, Page(s) 6722-6733.
摘要: 
The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 mm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA.
URI: http://hdl.handle.net/11455/86256
ISSN: 1424-8220
1424-8220
DOI: 10.3390/s140406722
Appears in Collections:機械工程學系所

Files in This Item:
File Description SizeFormat Existing users please Login
2015-3-4-6-4-4.pdf710.89 kBAdobe PDFThis file is only available in the university internal network   
Show full item record
 

Google ScholarTM

Check

Altmetric

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.